DocumentCode
439340
Title
Die stress characterization using arrays of CMOS sensors
Author
Bradley, A.T. ; Jaeger, R.C. ; Suhling, J.C. ; Zou, Yao ; Zou, Y.
Author_Institution
Auburn University, Auburn, AL
fYear
1998
fDate
22-24 Sept. 1998
Firstpage
472
Lastpage
475
Abstract
This paper presents theory for application of FET devices as mechanical stress sensors and demonstrates the use of CMOS FET differential pairs as practical temperature insensitive sensors. By controlling the type and orientation of the pairs, both the difference of the in-plane normal stresses as well as the in-plane shear stress can be extracted on the
Keywords
FETs; MOSFETs; Mechanical sensors; Piezoresistance; Resistors; Sensor arrays; Sensor phenomena and characterization; Stress; Temperature sensors; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference, 1998. ESSCIRC '98. Proceedings of the 24th European
Type
conf
DOI
10.1109/ESSCIR.1998.186311
Filename
1471068
Link To Document