• DocumentCode
    439408
  • Title

    An absolute air pressure smart sensor family with 2 dimensional calibration

  • Author

    Weiler, D. ; Machul, O. ; Amelung, J. ; Hammerschmidt, D. ; Hosticka, B.J.

  • Author_Institution
    Fraunhofer Institute of Microelectronic Circuits and Systems(IMS), Duisburg, Germany
  • fYear
    1999
  • fDate
    21-23 Sept. 1999
  • Firstpage
    254
  • Lastpage
    257
  • Abstract
    We present a monolithic pressure transducer family with on-chip pressure sensor, readout, linearization, and temperature compensation reaching an 1% accuracy after calibration. Temperature compensation and linearization are realized by two dimensional pwl interpolation using ΣΔ-modulators. This accuracy requires only a few calibration points for full pressure and temperature range. A prototype sensor system has been fabricated in an 1.2µm CMOS-process with surface mircomachining extension and occupies a chip area of 11.8mm2. The power consumption of this sensor system is ca. 6mW.
  • Keywords
    Bipolar transistors; Calibration; Capacitive sensors; Capacitors; Finite impulse response filter; Intelligent sensors; Sensor arrays; Sensor systems; Temperature sensors; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference, 1999. ESSCIRC '99. Proceedings of the 25th European
  • Conference_Location
    Duisburg, Germany
  • Type

    conf

  • Filename
    1471144
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=439408