• DocumentCode
    439450
  • Title

    ECL-CMOS logic LSI technology using 20 GHz latch with CMOS test circuits

  • Author

    Yabuki, Shinobu ; Hayashi, Atsuhiro ; Ito, Yuko ; Maruyama, Tetsuya ; Okada, Hidehiro ; Usami, Masami ; Higeta, Keiichi ; Hamamoto, Masato ; Isomura, Satoru

  • Author_Institution
    Hitachi Ltd., Tokyo, Japan
  • fYear
    1999
  • fDate
    21-23 Sept. 1999
  • Firstpage
    422
  • Lastpage
    423
  • Abstract
    An ECL-CMOS LSI for computing and communication including 280k ECL gates and 1Mbit RAM is developed with Advanced CMOS ECL Technology, which uses seven layer metallization including copper damascene and SGI/U-Isolation with SOI wafer. Used latch with CMOS test circuits has 20GHz toggle frequency and highly detectable delay test is possible.
  • Keywords
    CMOS logic circuits; CMOS technology; Circuit testing; Copper; Delay; Frequency; Large scale integration; Latches; Logic testing; Metallization;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference, 1999. ESSCIRC '99. Proceedings of the 25th European
  • Conference_Location
    Duisburg, Germany
  • Type

    conf

  • Filename
    1471186