DocumentCode
439450
Title
ECL-CMOS logic LSI technology using 20 GHz latch with CMOS test circuits
Author
Yabuki, Shinobu ; Hayashi, Atsuhiro ; Ito, Yuko ; Maruyama, Tetsuya ; Okada, Hidehiro ; Usami, Masami ; Higeta, Keiichi ; Hamamoto, Masato ; Isomura, Satoru
Author_Institution
Hitachi Ltd., Tokyo, Japan
fYear
1999
fDate
21-23 Sept. 1999
Firstpage
422
Lastpage
423
Abstract
An ECL-CMOS LSI for computing and communication including 280k ECL gates and 1Mbit RAM is developed with Advanced CMOS ECL Technology, which uses seven layer metallization including copper damascene and SGI/U-Isolation with SOI wafer. Used latch with CMOS test circuits has 20GHz toggle frequency and highly detectable delay test is possible.
Keywords
CMOS logic circuits; CMOS technology; Circuit testing; Copper; Delay; Frequency; Large scale integration; Latches; Logic testing; Metallization;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference, 1999. ESSCIRC '99. Proceedings of the 25th European
Conference_Location
Duisburg, Germany
Type
conf
Filename
1471186
Link To Document