• DocumentCode
    43952
  • Title

    VM-Based Baseline Predictive Maintenance Scheme

  • Author

    Yao-Sheng Hsieh ; Fan-Tien Cheng ; Hsien-Cheng Huang ; Chung-Ren Wang ; Saint-Chi Wang ; Haw-Ching Yang

  • Author_Institution
    Inst. of Manuf. Inf. & Syst., Nat. Cheng Kung Univ., Tainan, Taiwan
  • Volume
    26
  • Issue
    1
  • fYear
    2013
  • fDate
    Feb. 2013
  • Firstpage
    132
  • Lastpage
    144
  • Abstract
    Most conventional FDC approaches are used to find the TDs required for monitoring and the TDs´ related key parameters that need to be monitored, and then apply the SPC approach to detect the faults. However, in a practical situation, an abnormal key-parameter value may not be caused solely by its own TD; it may result from the other related parameters. Therefore, accurate fault classification or diagnosis may not be achieved. Moreover, most conventional PdM methods require a library of degradation patterns from previous run-to-failure data sets. Without those massive historical failure data, the PdM methods may not function properly. In this paper, we propose a virtual-metrology- (VM) based BPM scheme that possesses the capabilities of FDC and PdM. The BPM scheme contains the TD baseline model, FDC logic, and a RUL predictive module. The TD baseline model generated by the VM technique is applied to serve as the reference for detecting the fault. By applying the BPM scheme, fault diagnosis and prognosis can be accomplished, the problem of the conventional SPC method mentioned above can be resolved, and the requirement of massive historical failure data can also be released.
  • Keywords
    fault diagnosis; maintenance engineering; production equipment; remaining life assessment; abnormal key-parameter value; baseline predictive maintenance scheme; fault classification; fault detection; fault diagnosis; fault prognosis; production equipment; remaining useful life predictive module; target device baseline model; virtual metrology; Control charts; Data models; Degradation; Indexes; Maintenance engineering; Monitoring; Predictive models; Automatic virtual metrology (AVM); baseline predictive maintenance (BPM) scheme; dynamic-moving-window (DMW) scheme; fault detection and classification (FDC); keep important sample (KIS) scheme; predictive maintenance (PdM);
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2012.2218837
  • Filename
    6304937