DocumentCode
43952
Title
VM-Based Baseline Predictive Maintenance Scheme
Author
Yao-Sheng Hsieh ; Fan-Tien Cheng ; Hsien-Cheng Huang ; Chung-Ren Wang ; Saint-Chi Wang ; Haw-Ching Yang
Author_Institution
Inst. of Manuf. Inf. & Syst., Nat. Cheng Kung Univ., Tainan, Taiwan
Volume
26
Issue
1
fYear
2013
fDate
Feb. 2013
Firstpage
132
Lastpage
144
Abstract
Most conventional FDC approaches are used to find the TDs required for monitoring and the TDs´ related key parameters that need to be monitored, and then apply the SPC approach to detect the faults. However, in a practical situation, an abnormal key-parameter value may not be caused solely by its own TD; it may result from the other related parameters. Therefore, accurate fault classification or diagnosis may not be achieved. Moreover, most conventional PdM methods require a library of degradation patterns from previous run-to-failure data sets. Without those massive historical failure data, the PdM methods may not function properly. In this paper, we propose a virtual-metrology- (VM) based BPM scheme that possesses the capabilities of FDC and PdM. The BPM scheme contains the TD baseline model, FDC logic, and a RUL predictive module. The TD baseline model generated by the VM technique is applied to serve as the reference for detecting the fault. By applying the BPM scheme, fault diagnosis and prognosis can be accomplished, the problem of the conventional SPC method mentioned above can be resolved, and the requirement of massive historical failure data can also be released.
Keywords
fault diagnosis; maintenance engineering; production equipment; remaining life assessment; abnormal key-parameter value; baseline predictive maintenance scheme; fault classification; fault detection; fault diagnosis; fault prognosis; production equipment; remaining useful life predictive module; target device baseline model; virtual metrology; Control charts; Data models; Degradation; Indexes; Maintenance engineering; Monitoring; Predictive models; Automatic virtual metrology (AVM); baseline predictive maintenance (BPM) scheme; dynamic-moving-window (DMW) scheme; fault detection and classification (FDC); keep important sample (KIS) scheme; predictive maintenance (PdM);
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2012.2218837
Filename
6304937
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