• DocumentCode
    439646
  • Title

    A MEMS-based rotational accelerometer for HDD applications with 2.5rad/sec2resolution and digital output

  • Author

    Gola, A. ; Bagnalasta, N. ; Bendiscioli, P. ; Chiesa, E. ; Delbo, S. ; Lasalandra, E. ; Pasolini, F. ; Tronconi, M. ; Ungaretti, T. ; Baschirotto, A.

  • Author_Institution
    STMicroelectronics, Cornaredo, MI, Italy
  • fYear
    2001
  • fDate
    18-20 Sept. 2001
  • Firstpage
    321
  • Lastpage
    324
  • Abstract
    A 0.6µm BiCMOS interface for MEMS based rotational accelerometers is presented. The interface implements together with the MEMS sensor one single bit electromechanical ΣΔ conversion loop able to detect capacitive unbalancings as low as 50aF (50.10-18F), which corresponds to a rotational acceleration of 2.5rad/sec2. The produced bitstream is then processed by a digital chain and made available through a standard 3-wires digital interface. The device is intended for feed-forward compensation of external disturbances acting on computer HDDs so to steadily keep the read-write heads on track and to allow greater track densities.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference, 2001. ESSCIRC 2001. Proceedings of the 27th European
  • Conference_Location
    Villach, Austria
  • Type

    conf

  • Filename
    1471398
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=439646