A 80dB-SNR ± 1g fully-integrated biaxial linear accelerometer in a standard 0.5 µm CMOS technology for high-sensitivity applications

A fully-integrated biaxial linear accelerometer realized in a standard 0.5µm CMOS technology is proposed. The device features a full-scale of ±1g and a sensitivity of 250µg. No external components are required since a switched-capacitor low-pass filter is internally embedded which limits the output signal band to 30Hz. The biaxial sensor is packaged with the electronics. In the final device only four pins are active, plus a test pin. The device sensitivity is on-chip factory trimmed. This sensitivity is adjusted with a total accuracy of ±10%. The device exhibits a SNR of about 80dB and consumes 45mW from a single 5V supply.