DocumentCode
439848
Title
Σ Δ capacitive interface for a vertically-driven X& amp; Y-axis rate gyroscope
Author
Xuesong Jiang ; Bhave, S.A. ; Seeger, J.I. ; Howe, R.T. ; Boser, B.E. ; Yasaitis, J.
Author_Institution
University of California, Berkeley, CA, USA
fYear
2002
fDate
24-26 Sept. 2002
Firstpage
639
Lastpage
642
Abstract
This paper presents the capacitive sensing interface for a vertically-driven X&Y-Axis rate gyroscope fabricated in a monolithic MEMS/circuits technology with 0.8µm CMOS and 6µm thick structural polysilicon. The Coriolis-acceleration transducer and the capacitive sensing interface form a continuous-time 2nd-order 1-bit ΣΔ modulator. The gyroscope achieves 8.6°/sec/√Hz noise floor at atmospheric pressure.
Keywords
Acceleration; Accelerometers; Actuators; Atmospheric modeling; CMOS technology; Circuit noise; Gyroscopes; Q factor; Resonant frequency; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference, 2002. ESSCIRC 2002. Proceedings of the 28th European
Conference_Location
Florence, Italy
Type
conf
Filename
1471608
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