Title :
Co-Silicide Junction Leakage and Device Characteristics in Embedded DRAM with Stack Capacitor Structure
Author :
Kim, Jong-Chaen ; Lee, Wook-Ha ; Kim, Jin-Gu ; Chung, Shin-Young ; Nam, Jeong-Suk ; Lee, Jong-Lim ; Kim, Hongseog ; Song, Duheon
Author_Institution :
LG Semicon Co. Ltd., Cheongju, Korea
Keywords :
Capacitors; Degradation; Dielectric materials; Diodes; Heat treatment; Leakage current; Logic arrays; MOSFETs; Random access memory; Silicides;
Conference_Titel :
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location :
Leuven, Belgium
Print_ISBN :
2-86332-245-1
