DocumentCode

440248

Title

Study on Enhanced Performance in NMOSFETs on Strained Silicon

Author

Jurczak, M. ; Skotnicki, T. ; Ricci, G. ; Campidelli, Y. ; Hernandez, C. ; Bensahel, D.

Volume

1

fYear

1999

fDate

13-15 Sept. 1999

Firstpage

304

Lastpage

307

Keywords

Art; Doping; Effective mass; Germanium silicon alloys; MOSFETs; Rough surfaces; Semiconductor films; Silicon germanium; Surface roughness; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1999. Proceeding of the 29th European

Conference_Location

Leuven, Belgium

Print_ISBN

2-86332-245-1

Type

conf

Filename

1505500