DocumentCode
440251
Title
Full Characterization and Long-Term Stability of Standard CMOS Materials for Integrated Micromechanical Applications
Author
Kapels, H. ; Hierold, C. ; Maier-Schneider, D. ; Schneider, R.
Author_Institution
Infineon Technologies, Munich, Germany
Volume
1
fYear
1999
fDate
13-15 Sept. 1999
Firstpage
316
Lastpage
319
Keywords
Acceleration; Acoustic waves; Aluminum; Bridge circuits; Micromechanical devices; Plasma accelerators; Plasma measurements; Plasma temperature; Residual stresses; Stability;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location
Leuven, Belgium
Print_ISBN
2-86332-245-1
Type
conf
Filename
1505503
Link To Document