DocumentCode
440398
Title
Compact modelling of pocket-implanted MOSFETs
Author
Scholten, A.J. ; Duffy, R. ; van Langevelde, R. ; Klaassen, D.B.M.
Author_Institution
Philips Research Laboratories, Eindhoven, The Netherlands
fYear
2001
fDate
11-13 September 2001
Firstpage
311
Lastpage
314
Keywords
Analytical models; CMOS technology; Implants; Laboratories; MOSFETs; Medical simulation; Scattering; Semiconductor device modeling; Semiconductor process modeling; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 2001. Proceeding of the 31st European
Print_ISBN
2-914601-01-8
Type
conf
DOI
10.1109/ESSDERC.2001.195263
Filename
1506645
Link To Document