Nanohandling automation within a scanning electron microscope

Author

Wich, T. ; Sievers, T. ; Jähnisch, M. ; Hülsen, H. ; Fatikow, S.

Author_Institution

Div. Microrobotics & Control Eng., Oldenburg Univ., Germany

Volume

3

fYear

2005

fDate

20-23 June 2005

Firstpage

1073

Abstract

In this paper, current research regarding a semi-automated handling station for TEM-lamella is described. The development of this station started with automated handling of microparts as described in many previous publications. However, within this project, we were able to apply current research to an economically important task for the semiconductor industry - TEM-lamella handling. This task consists of automatic tracking of the lamella, picking it up from the silicon wafer and placing it on a TEM-grid.

Keywords

electronic engineering computing; materials handling; nanotechnology; scanning electron microscopes; semiconductor device manufacture; transmission electron microscopy; TEM-lamella handling; automatic tracking; nanohandling automation; scanning electron microscope; semiautomated handling station; semiconductor industry; silicon wafer; Automation; Circuit testing; Control engineering; Electron microscopy; Electronic equipment testing; Electronics industry; Electrostatics; Hardware; Low earth orbit satellites; Scanning electron microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial Electronics, 2005. ISIE 2005. Proceedings of the IEEE International Symposium on

Conference_Location

Dubrovnik, Croatia

Print_ISBN

0-7803-8738-4

Type

conf

DOI

10.1109/ISIE.2005.1529072

Filename

1529072