• DocumentCode
    443281
  • Title

    Test pattern for microwave dielectric properties of SrBi2Ta2O9

  • Author

    Delmonte, Nicola ; Watts, Bernard Enrico ; Rosa, Lorenzo ; Chiorboli, Giovanni ; Cova, Paolo ; Menozzi, Roberto

  • Author_Institution
    Dipt. di Ingegneria dell´´Informazione, Parma Univ., Italy
  • Volume
    1
  • fYear
    2005
  • fDate
    25-28 July 2005
  • Firstpage
    221
  • Abstract
    A test structure employing a one-step lithography process has been built for measuring the complex impedance of ferroelectric capacitors at microwaves. The measurements are compared to the results of a finite element analysis with the aim of developing an electrical model of the test structure in which parasitic elements appear. These elements can be experimentally measured and partially de-embedded. The purpose of this paper is the characterization of strontium-bismuth tantalate (SBT) capacitors for microwave ICs or SoCs.
  • Keywords
    bismuth compounds; dielectric properties; electron device testing; ferroelectric capacitors; lithography; microwave integrated circuits; strontium compounds; thin film capacitors; SrBi2Ta2O9; electrical model; ferroelectric capacitors; microwave dielectric properties; microwave integrated circuits; one-step lithography process; parasitic elements; strontium-bismuth tantalate capacitors; test structures; Capacitors; Dielectric measurements; Electric variables measurement; Ferroelectric materials; Finite element methods; Impedance measurement; Lithography; Microwave measurements; Strontium; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Research in Microelectronics and Electronics, 2005 PhD
  • Print_ISBN
    0-7803-9345-7
  • Type

    conf

  • DOI
    10.1109/RME.2005.1543044
  • Filename
    1543044
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=443281