DocumentCode
445334
Title
Interface and gate line edge roughness effects on intra die variance in mos device characteristics
Author
Gunther, Norman ; Hamadeh, E. ; Niemann, Darrell ; Rahman, Mahmud
Volume
1
fYear
2005
fDate
June 20-22, 2005
Firstpage
83
Lastpage
84
Keywords
Capacitance; Circuits; Electron devices; Fabrication; Fluctuations; MOS devices; Open systems; Predictive models; Strontium; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference Digest, 2005. DRC '05. 63rd
Print_ISBN
0-7803-9040-7
Type
conf
DOI
10.1109/DRC.2005.1553066
Filename
1553066
Link To Document