• DocumentCode
    445383
  • Title

    Semiconductor nanowires as a novel electronic materials technology for future electronic devices

  • Author

    Samuelson, L.

  • Volume
    1
  • fYear
    2005
  • fDate
    20-22 June 2005
  • Firstpage
    245
  • Lastpage
    245
  • Abstract
    Summary form only given, as follows. Extreme down-scaling of nanoelectronic devices by top-down fabrication methods may be hindered by several obstacles, such as the cost for patterning and processing, or inferior device performance due to process-induced damage. In this presentation I will present a bottom-up approach for nanometer-scale device abrication, based on seeded growth of semiconductor nanowires, using a method traditionally described as vapor-liquid-solid (VLS) growth. I will try to summarize how this approach has, in just 3-4 years, moved the technology from quite poorly controlled sprouting of nanowires without real control of dimensions or location, to a much more mature technology by which positioning and dimensions of nanowires as monolithic extensions of the substrate wafer are tightly controlled, and with the ability to create atomically abrupt and complex heterostructure devices, enabling devices such as resonant-tunneling diodes and singleelectron transistors to be created.
  • Keywords
    FETs; Fabrication; Gallium arsenide; Materials science and technology; Nanoscale devices; Nanostructures; Nanowires; Resonant tunneling devices; Silicon; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference Digest, 2005. DRC '05. 63rd
  • Conference_Location
    Santa Barbara, CA
  • Print_ISBN
    0-7803-9040-7
  • Type

    conf

  • DOI
    10.1109/DRC.2005.1553141
  • Filename
    1553141