• DocumentCode
    445749
  • Title

    Response kinetics of dielectric surface irradiated with ions to ozone influence

  • Author

    Arbuzov, Aleksey I. ; Dedkov, Vladimir S. ; Kabyshev, Alexander V. ; Lucanin, Alexander A.

  • Author_Institution
    High Voltage Res. Inst., Tomsk Polytech. Univ., Russia
  • Volume
    2
  • fYear
    2004
  • fDate
    26 June-3 July 2004
  • Firstpage
    182
  • Abstract
    Kinetics dependencies of electrical conduction of dielectrics irradiated with ions after influence ozone in air were considered. Possibility of the creation an ozone-sensitive elements on the base modified by ions BN and SiO2 was showed.
  • Keywords
    air; boron compounds; dielectric materials; ion beam effects; ozone; semiconductor materials; silicon compounds; surface conductivity; surface resistance; BN; SiO2; dielectric surface; dielectrics; electrical conduction; ion irradiation; ozone influence; ozone-sensitive elements; response kinetics; surface resistance; Atmospheric measurements; Ceramics; Dielectric measurements; Dielectric substrates; Glass; Kinetic theory; Phase change materials; Semiconductivity; Surface resistance; Surface treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Science and Technology, 2004. KORUS 2004. Proceedings. The 8th Russian-Korean International Symposium on
  • Print_ISBN
    0-7803-8383-4
  • Type

    conf

  • DOI
    10.1109/KORUS.2004.1555585
  • Filename
    1555585
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=445749