DocumentCode :
445751
Title :
Electromagnetic emission within the beat field of the silicon samples with differently polished surfaces
Author :
Arefyev, K. ; Salnikov, Vladimir ; Lukyanova, Evguenya
Author_Institution :
Tomsk Polytech. Inst., Russia
Volume :
2
fYear :
2004
fDate :
26 June-3 July 2004
Firstpage :
188
Abstract :
Results on measurement of impulse electromagnetic emission of the silicon samples with different surface treatment are presented in this paper.
Keywords :
elemental semiconductors; polishing; silicon; surface electromagnetic waves; Si; beat field; impulse electromagnetic emission; polished surface; surface treatment; Electromagnetic fields; Electromagnetic heating; Electromagnetic measurements; Grain size; Paramagnetic materials; Powders; Silicon; Solids; Surface treatment; Temperature distribution;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Science and Technology, 2004. KORUS 2004. Proceedings. The 8th Russian-Korean International Symposium on
Print_ISBN :
0-7803-8383-4
Type :
conf
DOI :
10.1109/KORUS.2004.1555587
Filename :
1555587
Link To Document :
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