Title :
Multilevel kinoform optical elements in fused silica for high-power laser optics
Author :
Atuchin, V.V. ; Kirpichnikov, A.V. ; Mikhailov, E.V. ; Soldatenkov, I.S.
Author_Institution :
Inst. of Semicond. Phys., Russian Acad. of Sci., Novosibirsk, Russia
fDate :
26 June-3 July 2004
Abstract :
The technology of kinoform optical elements in fused silica has been presented. Such diffraction phase optical elements as multilevel microlens arrays, randomizing phase masks and axicons have been fabricated and evaluated. Typical diffraction efficiency of eight-level phase microlens is as high as 84% at λ = 1.06μm.
Keywords :
computer-generated holography; diffractive optical elements; masks; microlenses; optical arrays; optical fabrication; silicon compounds; 1.06 mum; 84 percent; SiO2; axicons; diffraction efficiency; diffraction phase optical elements; fused silica; high-power laser; kinoform; multilevel microlens arrays; phase masks; Etching; Laser beams; Laser theory; Lenses; Lithography; Microoptics; Optical arrays; Optical diffraction; Phased arrays; Silicon compounds;
Conference_Titel :
Science and Technology, 2004. KORUS 2004. Proceedings. The 8th Russian-Korean International Symposium on
Print_ISBN :
0-7803-8383-4
DOI :
10.1109/KORUS.2004.1555589
