DocumentCode
446540
Title
SAW resonators on ceramics with controlled piezoelectric properties
Author
Sajin, George ; MOISIN, Ana Maria ; Craciunoiu, Florea ; DUMITRU, Alina-Lulia
Author_Institution
National Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania
Volume
1
fYear
2005
fDate
3-5 Oct. 2005
Firstpage
95
Abstract
The paper presents the works carried out in order to obtain SAW devices on ceramic substrates with controlled piezoelectric properties. As ceramics, two different perovskite type systems were chosen: lead titanate with rare earths substitutions and substituted lead titanate zirconate. The resonant frequency resulting from measurements on 12 resonators is distributed in a narrow range centred on 9 MHz. A very important limiting parameter is the roughness of the substrate and a comparison between two ceramics with different surface polishing degrees is made.
Keywords
ceramics; lead compounds; piezoelectricity; polishing; surface acoustic wave resonators; surface roughness; (Pb1-1.5xLax)(Ti1-yMny)O3; (Pb1-1.5xSmx)(Ti1-yMny)O3; Pb(Zr0.52Ti0.48)1-yNbyO3; SAW resonators; ceramics; controlled piezoelectric properties; perovskite type systems; rare earths substitutions; resonant frequency; surface polishing; Ceramics; Crystalline materials; Dielectric materials; Dielectric substrates; Milling machines; Piezoelectric materials; Powders; Rough surfaces; Surface acoustic waves; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International
Print_ISBN
0-7803-9214-0
Type
conf
DOI
10.1109/SMICND.2005.1558719
Filename
1558719
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