Membrane supported 77 GHZ Yagi-Uda antennae: design and experiment

Author

Neculoiu, D. ; Muller, A. ; Vasilache, D. ; Petrini, I. ; Buiculescu, C. ; Plana, R. ; Pons, P. ; Bary, L. ; Saadaoui, M.

Author_Institution

IMT, Bucharest, Romania

Volume

1

fYear

2005

fDate

3-5 Oct. 2005

Firstpage

123

Abstract

This paper presents the design, fabrication and "on wafer" characterization of membrane supported Yagi-Uda coplanar waveguide fed antennae structures, operating in the 77 GHz frequency range. The antennae were fabricated on 1.4 μm thin SiO₂/Si₃N₄ membranes obtained by micromachining of high resistivity silicon, using backside wet etching process. The design was based on electromagnetic simulations, using Zeland IE3D software package. The antenna structures, measured "on wafer", have shown a gain of about 10 dBi. A good agreement has been observed between the experimental and simulated results.

Keywords

antenna feeds; coplanar waveguides; millimetre wave antennas; silicon compounds; 1.4 mum; 77 GHz; Si₃N₄; SiO₃; membrane supported Yagi-Uda coplanar waveguide fed antennae structures; on-wafer characterization; wet etching process; Biomembranes; Conductivity; Coplanar waveguides; Electromagnetic waveguides; Frequency; Micromachining; Optical device fabrication; Process design; Silicon; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International

Print_ISBN

0-7803-9214-0

Type

conf

DOI

10.1109/SMICND.2005.1558726

Filename

1558726