DocumentCode
446551
Title
Polymeric waveguides with bio(chemical) sensing applications-design and preliminary experimental results
Author
Rebigan, R. ; Esinenco, D. ; Kusko, M.
Author_Institution
Nat. Inst. for Res. Devt. in Microtechnologies, Bucharest, Romania
Volume
1
fYear
2005
fDate
3-5 Oct. 2005
Firstpage
165
Abstract
In this paper we describe the preliminary experiments for a polymeric (bio)chemical sensor-integrated on silicon substrate, based on the far-field interferometric method. The basic structure of the sensor consists of a sandwich-waveguide polymeric structure. Several experimental studies have been performed in order to optimize the technological flow. We also have performed design studies in order to optimize the proposed structure.
Keywords
biosensors; chemical sensors; integrated optics; light interferometry; optical design techniques; optical polymers; optical sensors; optical waveguides; Si; bio(chemical) sensing; design; far-field interferometric method; polymeric waveguides; sandwich-waveguide polymeric structure; silicon substrate; Biomedical optical imaging; Biosensors; Interference; Optical interferometry; Optical sensors; Optical waveguides; Planar waveguides; Polymers; Refractive index; Waveguide transitions;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International
Print_ISBN
0-7803-9214-0
Type
conf
DOI
10.1109/SMICND.2005.1558737
Filename
1558737
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