• DocumentCode
    447602
  • Title

    Photoelectric laser stimulation in a failure analysis laboratory

  • Author

    Firiti, A. ; Lewis, D. ; Beaudoin, F. ; Perdu, P. ; Haller, G. ; Fouillat, P.

  • Author_Institution
    ST Microelectron., Rousset, France
  • Volume
    1
  • fYear
    2004
  • fDate
    4-7 May 2004
  • Firstpage
    101
  • Abstract
    First photoelectric laser stimulation results (OBIC or LIVA) obtained with a laser scanning microscope which is a new version of the PHEMOS 1000 from Hamamatsu are presented. This technique is illustrated on ESD defect localization.
  • Keywords
    electrostatic discharge; failure analysis; lasers; optical microscopes; photoelectric devices; ESD defect localization; PHEMOS 1000; failure analysis laboratory; laser scanning microscope; photoelectric laser stimulation; Electrostatic discharge; Failure analysis; Laboratories; Laser beams; Optical beams; Optical microscopy; Photovoltaic effects; Silicon; Stimulated emission; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Industrial Electronics, 2004 IEEE International Symposium on
  • Print_ISBN
    0-7803-8304-4
  • Type

    conf

  • DOI
    10.1109/ISIE.2004.1571789
  • Filename
    1571789
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=447602