DocumentCode
447605
Title
A microcontroller based wall shear stress measurement
Author
Laghrouche, M. ; Meunier, D. ; Boussey, J. ; Tardu, S. ; Adane, A.
Author_Institution
Inst. of Microelectronics, Electromagn. & Photonics, ENSERG, Grenoble, France
Volume
1
fYear
2004
fDate
4-7 May 2004
Firstpage
121
Abstract
A new type of hot wire anemometer was developed by using surface micro machining techniques. The reduction of the microprobes section and the development of a thermal isolation cavity below the hot polycrystalline silicon wire reduced considerably indirect thermal exchanges between the hot wire and its substrate. As a consequence, the response time of the sensor is considerably improved allowing the detection of fast fluctuations and turbulent phenomena in fluid mechanics. In this paper we briefly describe the realisation technology of the developed sensors, its operation principles and the data acquisition circuit especially conceived and realised to perform turbulent flow detection in a low speed wind tunnel.
Keywords
anemometers; fluid mechanics; microcontrollers; micromachining; sensors; silicon; stress measurement; turbulence; wires; data acquisition circuit; fluid mechanics; hot polycrystalline silicon wire; hot wire anemometer; low speed wind tunnel; microcontroller; microprobes section reduction; sensors; substrate; surface micro machining techniques; thermal exchanges; thermal isolation cavity reduction; turbulent flow detection; wall shear stress measurement; Data acquisition; Delay; Fluctuations; Fluid flow measurement; Machining; Microcontrollers; Sensor phenomena and characterization; Silicon; Stress measurement; Wire; MEMS; sensor data acquisition; wall shear stress sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Industrial Electronics, 2004 IEEE International Symposium on
Print_ISBN
0-7803-8304-4
Type
conf
DOI
10.1109/ISIE.2004.1571793
Filename
1571793
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