DocumentCode
447750
Title
Fabrication of a two-dimensional photonic crystal using deep vertical etching of polyethylene terephtalate plastic
Author
Komijany, Y. ; Pisheh, H. Sedaghat ; Shahabadi, M. ; Mohajerzadeh, S. ; Sadeghi, M. ; Fallah, B. ; Araghchini, M.
Author_Institution
Dept. of Electr. & Comput. Eng., Tehran Univ., Iran
Volume
1
fYear
2005
fDate
19-23 Sept. 2005
Firstpage
109
Abstract
Using a novel technique for deep vertical etching of PET, a two-dimensional photonic crystal slab is fabricated. Vertical confinement is obtained using both specular and total reflection. The technique can achieve dimensions required for realization of two-dimensional photonic crystals at infrared and terahertz frequencies.
Keywords
photonic crystals; plastics; sputter etching; 2D photonic crystal slab; PET; deep vertical etching; infrared frequencies; polyethylene terephtalate plastic; specular reflection; terahertz frequencies; total reflection; vertical confinement; Etching; Fabrication; Frequency; Optical reflection; Photonic band gap; Photonic crystals; Plastics; Polyethylene; Positron emission tomography; Slabs;
fLanguage
English
Publisher
ieee
Conference_Titel
Infrared and Millimeter Waves and 13th International Conference on Terahertz Electronics, 2005. IRMMW-THz 2005. The Joint 30th International Conference on
Print_ISBN
0-7803-9348-1
Type
conf
DOI
10.1109/ICIMW.2005.1572431
Filename
1572431
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