• DocumentCode
    448228
  • Title

    Fabrication of two-layer microphotonic structures without planarization

  • Author

    Qi, Minghao ; Watts, Michael R. ; Barwicz, Tymon ; Rakich, Peter T. ; Socci, Luciano ; Ippen, Erich P. ; Smith, Henry I.

  • Author_Institution
    Res. Lab. of Electron., Massachusetts Inst. of Technol., Cambridge, MA, USA
  • Volume
    2
  • fYear
    2005
  • fDate
    22-27 May 2005
  • Firstpage
    1288
  • Abstract
    A novel nanofabrication scheme for two-layer microphotonic structures were proposed and applied to the fabrication of integrated, mode-evolution-based polarization splitters and rotators. Prototype devices demonstrated effective splitting and rotating of polarization with low cross-talk.
  • Keywords
    integrated optics; light polarisation; micro-optics; nanotechnology; optical beam splitters; optical fabrication; cross-talk; mode-evolution-based polarization splitters; nanofabrication; planarization; prototype devices; rotators; two-layer microphotonic structures; Chromium; Etching; Optical device fabrication; Optical devices; Optical fiber polarization; Optical materials; Optical polarization; Planarization; Silicon compounds; Tellurium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2005. (CLEO). Conference on
  • Print_ISBN
    1-55752-795-4
  • Type

    conf

  • DOI
    10.1109/CLEO.2005.202101
  • Filename
    1573167
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=448228