Development of X-ray active matrix pixel sensors for detection of electrons in scanning transmission electron microscope

Author

Chen, W. ; Beuttenmuller, R.H. ; Elliott, D.C. ; Fried, J. ; DeGeronimo, G. ; Li, Z. ; O´Connor, P. ; Pinelli, D.A. ; Radeka, V. ; Rehak, P. ; Smith, G.C. ; Wall, J.S. ; Yu, B.

Author_Institution

Brookhaven Nat. Lab., Upton, NY, USA

Volume

3

fYear

2005

fDate

23-29 Oct. 2005

Firstpage

1431

Lastpage

1435

Abstract

A method developed to produce an X-ray active matrix pixel sensor (XAMPS) is reported. Several problems had been encountered during the production, but solutions to all of them were found. We will present the design of the detector, justifying the choice of high resistivity silicon as the material for XAMPS. Production processing will be described with emphasis on encountered problems and their solutions. The detectors were produced and one of them was tested within the BNL scanning transmission electron microscope (STEM) for recording data.

Keywords

X-ray apparatus; electron detection; position sensitive particle detectors; scanning-transmission electron microscopes; silicon radiation detectors; X-ray active matrix pixel sensors; convergent beam electron diffraction pattern; electron detection; high resistivity silicon; scanning transmission electron microscope; Bonding; Conductivity; Crystallization; Production; Scanning electron microscopy; Silicon; Testing; Transmission electron microscopy; X-ray detection; X-ray detectors;

fLanguage

English

Publisher

ieee

Conference_Titel

Nuclear Science Symposium Conference Record, 2005 IEEE

ISSN

1095-7863

Print_ISBN

0-7803-9221-3

Type

conf

DOI

10.1109/NSSMIC.2005.1596589

Filename

1596589