Title :
Optical Loss Analysis of Silicon Rich Nitride Waveguides
Author :
Mertens, H. ; Andersen, K.N. ; Svendsen, W.E.
Author_Institution :
COM, Technical University of Denmark, Building 345 west, DK-2800 Kgs. Lyngby, Denmark, hm@com.dtu.dk
Abstract :
An analysis of the propagation loss in high-index LPCVD-grown silicon rich nitride (SRN) slab waveguides and channel waveguides is presented. A propagation loss as low as 0.6 dB/cm has been achieved.
Conference_Titel :
Optical Communication, 2002. ECOC 2002. 28th European Conference on
Conference_Location :
Copenhagen
Print_ISBN :
87-90974-63-8
