• DocumentCode
    452409
  • Title

    Mirrors With Integrated Position Sense Electronics for Optical Switching Applications

  • Author

    Roessig, Trey ; Arakelian, Ara ; Brosnihan, Tim ; Clark, Bill ; Han, David ; Judy, Michael ; Juneau, Thor ; Lemkin, Mark ; Sherman, Steve ; Swift, Jeff

  • Author_Institution
    Analog Devices, 2150 Shattuck Ave, Suite 450, Berkeley, CA 94704 USA, trey.roessig@analog.com
  • Volume
    3
  • fYear
    2002
  • fDate
    8-12 Sept. 2002
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    This paper describes novel MEMS mirror structures fabricated with on-chip capacitve position sensing capability. This technology could drastically lower the cost of all-optical switches. Methodology and initial results of the position sense functionality are described.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Communication, 2002. ECOC 2002. 28th European Conference on
  • Conference_Location
    Copenhagen
  • Print_ISBN
    87-90974-63-8
  • Type

    conf

  • Filename
    1601215
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=452409