DocumentCode
452612
Title
Shear mode A1N thin film electroacoustic resonator for biosensor applications
Author
Wingqvist, G. ; Bjurström, J. ; Katardjiev, I.
Volume
1
fYear
2005
fDate
18-21 Sept. 2005
Firstpage
50
Lastpage
53
Keywords
Acoustic waves; Biosensors; Fabrication; Film bulk acoustic resonators; Piezoelectric films; Resonant frequency; Sputtering; Substrates; Surface acoustic waves; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2005 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-9382-1
Type
conf
DOI
10.1109/ULTSYM.2005.1602793
Filename
1602793
Link To Document