DocumentCode :
452640
Title :
Volume manufacturing aspects of baw filters on a production cluster system
Author :
Lanz, Roman ; Lambert, Christian
Volume :
1
fYear :
2005
fDate :
18-21 Sept. 2005
Firstpage :
210
Lastpage :
214
Keywords :
Acoustic reflection; Bulk acoustic wave devices; Electrodes; Filters; Frequency; Manufacturing processes; Optical films; Piezoelectric films; Production systems; Sputtering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1602833
Filename :
1602833
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=452640
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