DocumentCode
452641
Title
Improving manufacturability of aln deposition used in making bulk acoustic wave devices
Author
Mishin, S. ; Sylvia, B. ; Marx, D.R.
Volume
1
fYear
2005
fDate
18-21 Sept. 2005
Firstpage
215
Lastpage
218
Keywords
Bulk acoustic wave devices; Film bulk acoustic resonators; Filters; Magnetic materials; Manufacturing; Piezoelectric films; Production; Sputtering; Stress control; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2005 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-9382-1
Type
conf
DOI
10.1109/ULTSYM.2005.1602834
Filename
1602834
Link To Document