DocumentCode

452658

Title

Design and testing of rotors for a cylindrical micro-machined micro ultrasonic motor

Author

Kanda, T. ; Oomori, Y. ; Makino, A. ; Suzumori, K. ; Kobayashi, A.

Volume

1

fYear

2005

fDate

18-21 Sept. 2005

Firstpage

301

Lastpage

304

Keywords

Ceramics; Electrodes; Engine cylinders; Glass; Micromotors; Piezoelectric materials; Piezoelectric transducers; Rotors; Stators; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2005 IEEE

ISSN

1051-0117

Print_ISBN

0-7803-9382-1

Type

conf

DOI

10.1109/ULTSYM.2005.1602855

Filename

1602855