DocumentCode
452686
Title
Low propagation loss of atomically-flat surface aln with low dislocation density for 5-ghz band saw devices
Author
Uehara, K. ; Aota, Y. ; Kameda, S. ; Nakase, H. ; Tsubouchi, K.
Volume
1
fYear
2005
fDate
18-21 Sept. 2005
Firstpage
455
Lastpage
458
Keywords
Atomic layer deposition; Ducts; Hydrogen; Inductors; MOCVD; Propagation losses; Rough surfaces; Substrates; Surface acoustic wave devices; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2005 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-9382-1
Type
conf
DOI
10.1109/ULTSYM.2005.1602891
Filename
1602891
Link To Document