DocumentCode

452689

Title

Design, modeling and fabrication of piezoelectric micromachined ultrasonic transducers

Author

Belgacem, B. ; Calame, F. ; Muralt, P.

Volume

1

fYear

2005

fDate

18-21 Sept. 2005

Firstpage

483

Lastpage

486

Keywords

Acoustic beams; Analytical models; Biomembranes; Ceramics; Electrodes; Fabrication; Frequency; Laboratories; Resonance; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2005 IEEE

ISSN

1051-0117

Print_ISBN

0-7803-9382-1

Type

conf

DOI

10.1109/ULTSYM.2005.1602896

Filename

1602896