DocumentCode :
452690
Title :
MEMS ultrasonic sensor array with thick film PZT transducers
Author :
Doerner, S. ; Hirsch, S. ; Lucklum, R. ; Schmidt, B. ; Hauptmann, P.R. ; Ferrari, V. ; Ferrari, M.
Volume :
1
fYear :
2005
fDate :
18-21 Sept. 2005
Firstpage :
487
Lastpage :
490
Keywords :
Biomembranes; Electrodes; Fabrication; Micromechanical devices; Sensor arrays; Silicon; Thick film sensors; Thick films; Ultrasonic transducer arrays; Ultrasonic transducers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1602897
Filename :
1602897
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=452690
