Title :
Keynote Address: The Dynamics of Degenerate Mode MEMS Sensors
Author :
Burdess, Professor Jim
Author_Institution :
Univ. of Newcastle upon Tyne, Newcastle upon Tyne
Abstract :
A collection of slides from author´s conference presentation is given.
Keywords :
gyroscopes; microsensors; MEMS sensors; damping control; degenerate mode; electrostatic tuning; fabrication process; gyroscopes;
Conference_Titel :
MEMS Sensors and Actuators, 2006. The Institution of Engineering and Technology Seminar on
Conference_Location :
London
Print_ISBN :
0-86341-627-6
