3D Micro-fabrication Processes: A Review

We review the state of the art in micro-scale fabrication processes capable of producing three-dimensional parts and features. Their number and heterogeneity makes an exhaustive review impossible. We selected processes according to how well they satisfied the following criteria. They should ideally have made the leap from research laboratory to industry or appear likely to do so in the near- to mid-term. Resolution should be high. Throughput should be high. The variety of materials from which parts can be fabricated should be large. Finally, constraints on the geometries of parts that can be realized should be few. The review is based on the literature in the field. We have done our best to track down and include references to as many published reviews of technologies and technology families within our broad scope, though we have been a little disappointed not to find more.