DocumentCode

455585

Title

Design, Modelling and Fabrication of Piezoelectric MEMS Devices

Author

Kirby, Paul

fYear

2006

fDate

28-28 April 2006

Firstpage

299

Lastpage

300

fLanguage

English

Publisher

iet

Conference_Titel

MEMS Sensors and Actuators, 2006. The Institution of Engineering and Technology Seminar on

Conference_Location

London

ISSN

0537-9989

Print_ISBN

0-86341-627-6

Type

conf

Filename

1662203