DocumentCode
45579
Title
Modal Parameter Tuning of an Axisymmetric Resonator via Mass Perturbation
Author
Schwartz, David M. ; Kim, Dennis ; Stupar, Philip ; DeNatale, Jeffrey ; M´Closkey, Robert T.
Author_Institution
ATA Eng. Inc., San Diego, CA, USA
Volume
24
Issue
3
fYear
2015
fDate
Jun-15
Firstpage
545
Lastpage
555
Abstract
This paper reports the permanent frequency mismatch reduction of the primary wineglass modes in a planar axisymmetric resonator by strategic mass loading. The resonator consists of a set of concentric rings that are affixed to neighboring rings by a staggered system of spokes. The outer layers of spokes are targets for mass deposition. This paper develops modified ring equations that guide the mass perturbation process, and despite the fact that the deposited mass and deposition locations are quantized, it is possible to systematically reduce the frequency difference of the wineglass modes to effective degeneracy such that two modes cannot be distinguished in a frequency response plot. Results on five resonators are reported with nominal wineglass modes near 14 kHz, quality factors of 50k, and frequency mismatches exceeding 30 Hz in some cases, but with postperturbation mismatches smaller than 80 mHz. Furthermore, it is also shown that the quality factors remain unchanged.
Keywords
frequency response; glass; microfabrication; micromechanical resonators; modal analysis; concentric ring; frequency difference reduction; frequency response plot; mass deposition; mass perturbation process; modal parameter tuning; modified ring equation; permanent frequency mismatch reduction; planar axisymmetric micromechanical resonator; postperturbation mismatch; primary wineglass mode; staggered spoke system; strategic mass loading; Electrodes; Fabrication; Frequency measurement; Gold; Reservoirs; Resonant frequency; Tuning; Gyroscopes; microsensors; sensor phenomena and characterization; sensor phenomena and characterization.;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2015.2393858
Filename
7029051
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