Scaling Meander Inductors from Micro to Nano

Author

Stojanovic, Goran ; Ljikar, Tamara ; Sorda, Roman

Volume

1

fYear

2006

fDate

27-29 Sept. 2006

Firstpage

93

Lastpage

96

Abstract

In order to efficiently scale down RF circuits it is necessary also to decrease the size of the inductors. The ultimate limit of this miniaturization would be an RF circuit consisting of nano-scaled inductors. Meander nanoinductors presented in this work were fabricated by electron beam lithography. Their performance was investigated by electromagnetic simulation software. It was found that inductance and quality factor of these inductors linearly scale down with their size. Nano-inductors could offer advantages at higher frequencies because their quality factor linearly increases with frequency in the range where the quality factor of the micro-inductors reaches a maximum

Keywords

Q-factor; electron beam lithography; inductors; nanoelectronics; radiofrequency integrated circuits; electromagnetic simulation software; electron beam lithography; meander nanoinductors; nanoscaled inductors; quality factor; radiofrequency circuits; scaling meander inductors; size reduction; Circuit simulation; Electromagnetic induction; Electron beams; Frequency; Inductance; Inductors; Lithography; Object oriented modeling; Q factor; Software packages; electron beam lithography; meander; micro inductors; nano inductors;

fLanguage

English

Publisher

ieee

Conference_Titel

International Semiconductor Conference, 2006

Conference_Location

Sinaia

Print_ISBN

1-4244-0109-7

Type

conf

DOI

10.1109/SMICND.2006.283939

Filename

4063166