DocumentCode
460324
Title
Tunable MEMS Filters for Millimeter Wave Applications
Author
Takacs, A. ; Neculoiu, D. ; Vasilache, D. ; Muller, A. ; Pons, P. ; Aubert, H. ; Plana, R.
Author_Institution
IMT Bucharest
Volume
1
fYear
2006
fDate
27-29 Sept. 2006
Firstpage
115
Lastpage
118
Abstract
This paper addresses the design and the realization of millimeter wave tunable filters using MEMS (micro-electro-mechanical-systems) technology. In order to design hands top tunable MEMS filters two new topologies are presented. The tunable behavior is achieved using MEMS switches. These switches, based on original topology of two cantilever shunt switch, have a typical shunt switch behavior and low actuation voltage. The overall structures are manufactured using dielectric membrane
Keywords
band-stop filters; membranes; micromechanical devices; microswitches; millimetre wave filters; MEMS switches; bandstop filter; cantilever shunt switch; dielectric membrane; microelectro-mechanical-systems; millimeter wave filters; tunable MEMS filters; Biomembranes; Dielectrics; Filters; Low voltage; Manufacturing; Micromechanical devices; Microswitches; Millimeter wave technology; Switches; Topology; MEMS; bandstop filter; dielectric membrane; tunable filter;
fLanguage
English
Publisher
ieee
Conference_Titel
International Semiconductor Conference, 2006
Conference_Location
Sinaia
Print_ISBN
1-4244-0109-7
Type
conf
DOI
10.1109/SMICND.2006.283945
Filename
4063172
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