Advanced Magnetoresistance Sensing of Rotation Rate for Biomedical Applications

Author

Avram, Marioara ; Volmer, Marius ; Avram, Andrei Marius ; Iliescu, Ciprian ; Bragaru, A.

Author_Institution

National Inst. for Res. & Dev. in Microtechnologies, Bucharest

Volume

1

fYear

2006

fDate

27-29 Sept. 2006

Firstpage

231

Lastpage

234

Abstract

We propose the use of a magnetoresistive sensor with a non-contacting transduction mechanism to transform the rotor rotation rate into an electrical signal. The rotor is fabricated from polysilicon and coated with a soft magnetic material, such Permalloy, with an in-plane uniaxial magnetization. As the rotor turns, the field from this microscopic magnet modulates the resistance of a bar of a low coercitivity material such as Permalloy placed nearby, close to the rotor flanges. The change in resistivity provides an electrical signal with frequency proportional to the rotation rate, and hence the fluid velocity

Keywords

biological fluid dynamics; biosensors; coercive force; magnetic sensors; magnetoresistance; magnetoresistive devices; rotors; soft magnetic materials; biomedical applications; electrical signal; in-plane uniaxial magnetization; low coercitivity material; magnetoresistance sensor; magnetoresistive sensor; microscopic magnet; noncontacting transduction mechanism; rotor rotation rate; soft magnetic material; Biosensors; Electric resistance; Immune system; Magnetic force microscopy; Magnetic materials; Magnetic modulators; Magnetic sensors; Magnetization; Magnetoresistance; Soft magnetic materials; Giant magnetoresistance (GMR); Magnetic detection; Position sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

International Semiconductor Conference, 2006

Conference_Location

Sinaia

Print_ISBN

1-4244-0109-7

Type

conf

DOI

10.1109/SMICND.2006.283975

Filename

4063202