• DocumentCode
    46206
  • Title

    Organic Imager on Readout Backplane Based on TFTs With Cross-Linkable Dielectrics

  • Author

    Malinowski, Pawel E. ; Vicca, Peter ; Willegems, Myriam ; Schols, Sarah ; Cheyns, David ; Smout, Steve ; Ameys, Marc ; Myny, Kris ; Vaidyanathan, Subramanian ; Martin, Eric ; Kumar, Ajit ; van der Steen, Jan-Laurens ; Gelinck, Gerwin ; Heremans, Paul

  • Author_Institution
    imec, Leuven, Belgium
  • Volume
    26
  • Issue
    21
  • fYear
    2014
  • fDate
    Nov.1, 1 2014
  • Firstpage
    2197
  • Lastpage
    2200
  • Abstract
    We report on the fabrication of imagers based on organic semiconductors both in the photodiode layer and in the readout backplane. The photodiode is based on evaporated ultrathin (<;100 nm) stack of SubPc/C60, sensitive in the wavelength range between 300 and 650 nm. The readout circuit is a switch matrix fabricated with a solution processed semiconductor (XPRD30B01) and two solution processed, crosslinkable dielectrics (XDRD30B01). The readout TFTs (140/5-μm channel width/length, respectively) have leakage current lower than 1 pA with the ON-current higher than 0.1 μA. The 32 × 32 pixel imagers with pixel pitch down to 200 μm are demonstrated with mean dark signal of a few μA/cm2 and linear photoresponse up to the incident power of 100 μW. These results show feasibility of fabricating readout circuits with TFTs based on crosslinkable dielectrics. This enables reduction of two patterning steps (opening of the gate dielectric and of the encapsulation layer) to just photolithography, leading to simplification of the backplane manufacturing process.
  • Keywords
    carbon; dielectric materials; encapsulation; image sensors; integrated optics; micro-optics; microfabrication; optical fabrication; optical switches; organic semiconductors; photodetectors; photodiodes; photolithography; readout electronics; C60; cross-linkable dielectrics; encapsulation layer; evaporated ultrathin stack; linear photoresponse; organic imager fabrication; organic semiconductors; photodiode layer; photolithography; power 100 muW; readout TFT; readout backplane; readout circuit fabrication; size 140 mum; size 5 mum; switch matrix; wavelength 300 nm to 650 nm; Backplanes; Dielectrics; Encapsulation; Fabrication; Logic gates; Photodetectors; Thin film transistors; Photodetector; TFT; heterogeneous integration; imager; organic;
  • fLanguage
    English
  • Journal_Title
    Photonics Technology Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1041-1135
  • Type

    jour

  • DOI
    10.1109/LPT.2014.2350035
  • Filename
    6883179