Title :
Voltage Elevator using a MEMS Resonator
Author_Institution :
Dept. of Electron. Eng., Seville Univ.
Abstract :
This paper proposes a new approach to realize a voltage elevator using a single MEMS capacitor with movable plates. This device works in resonant mode, and this feature allows for the use of low input voltage. Complete electrical and mechanical equivalent SIMULINK models have been designed. The simulation results provide full analysis of its complex chaotic behavior. Design criteria are deduced for a specific application.
Keywords :
capacitors; mathematics computing; micromechanical resonators; MEMS capacitor; MEMS resonator; SIMULINK models; complex chaotic behavior; voltage elevator; Actuators; Analytical models; Capacitors; Electronic circuits; Elevators; Low voltage; Micromechanical devices; Resonance; Springs; Switches;
Conference_Titel :
Circuits and Systems, 2007. ISCAS 2007. IEEE International Symposium on
Conference_Location :
New Orleans, LA
Print_ISBN :
1-4244-0920-9
Electronic_ISBN :
1-4244-0921-7
DOI :
10.1109/ISCAS.2007.378455