Progress in Large Integration Scale Circuits in SiON Technology

Author

Melloni, A. ; Morichetti, F. ; Cusmai, G. ; Costa, R. ; Breda, A. ; Canavesi, C. ; Martinelli, M.

Author_Institution

Politecnico di Milano, Milano

Volume

1

fYear

2007

fDate

1-5 July 2007

Firstpage

223

Lastpage

226

Abstract

In this contribution the potentialities and the limitation of the silicon oxynitride (SiON) technology are reviewed and a number of integrated optical circuits and devices are presented. Mach-Zehnder, ring resonators, variable bandwidth filters, ring resonators based cross-bar matrices and a DQPSK receiver with interleaver and variable attenuators have been realized, characterized and tested in a 10 Gbit/s WDM system.

Keywords

integrated optics; matrix algebra; optical fibre communication; optical fibre filters; optical modulation; optical receivers; quadrature phase shift keying; silicon compounds; wavelength division multiplexing; DQPSK receiver; Mach-Zehnder; SiON; SiON technology; WDM system; bit rate 10 Gbit/s; cross-bar matrices; integrated optical circuits; large integration scale circuits; optical fibers; ring resonators; silicon oxynitride technology; variable attenuators; variable bandwidth filters; Bandwidth; Integrated circuit technology; Integrated optics; Optical attenuators; Optical devices; Optical filters; Optical receivers; Optical ring resonators; Resonator filters; Silicon; Delay lines; Integrated optics; Optical Filters; Silicon Oxynitride;

fLanguage

English

Publisher

ieee

Conference_Titel

Transparent Optical Networks, 2007. ICTON '07. 9th International Conference on

Conference_Location

Rome

Print_ISBN

1-4244-1249-8

Electronic_ISBN

1-4244-1249-8

Type

conf

DOI

10.1109/ICTON.2007.4296073

Filename

4296073