DocumentCode
468060
Title
The Analysis of the Appropriateness of the Microelectromechanical Systems Sensor Devices (MEMS) Construction on the base of the Active Semiconductor Elements
Author
Matviykiv, Mykhaylo ; Lobur, Mykhaylo ; Teslyuk, Vasyl ; Matviykiv, Taras
Author_Institution
Dept. of Autom. Design Syst. & Electron. Means for inf. & Comput. Technol., Nat. Univ. "Lvivska Politekhnika", Lviv
fYear
2006
fDate
Feb. 28 2006-March 4 2006
Firstpage
663
Lastpage
663
Abstract
The appropriateness of the microelectromechanical systems sensor devices (MEMS) construction on the base of the active semiconductor elements -diodes is analyzed.
Keywords
microsensors; semiconductor diodes; active semiconductor elements; microelectromechanical systems sensor devices; semiconductor diodes; Capacitive sensors; Current density; Mechanical sensors; Microelectromechanical systems; Micromechanical devices; Photonic band gap; Schottky diodes; Semiconductor diodes; Sensor systems; Silicon; MEMS; sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Modern Problems of Radio Engineering, Telecommunications, and Computer Science, 2006. TCSET 2006. International Conference
Conference_Location
Lviv-Slavsko
Print_ISBN
966-553-507-2
Type
conf
DOI
10.1109/TCSET.2006.4404676
Filename
4404676
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