DocumentCode
472687
Title
Scaling CMOS Technologies with Constant Latch-Up Immunity
Author
Lewis, Alan G. ; Martin, Russel A. ; Huang, Tiao Y. ; Chen, John Y. ; Bruce, Richard H.
Author_Institution
Xerox, Palo Alto Research Center, 3333, Coyote Hill Road, Palo Alto, CA 94304
fYear
1986
fDate
28-30 May 1986
Firstpage
23
Lastpage
24
Keywords
Bipolar transistors; CMOS technology; Circuits; Critical current; Doping; Epitaxial layers; Geometry; Substrates; Testing; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1986. Digest of Technical Papers. Symposium on
Conference_Location
San Diego, CA, USA
Type
conf
Filename
4480351
Link To Document