Two-Dimensional Simulation of Glass Reflow and Silicon Oxidation

Author

Sutardja, Pantas ; Shacham-Diamand, Yosi ; Oldham, W.G.

Author_Institution

Electronics Research Laboratory Department of Electrical Engineering and Computer Sciences University of California, Berkeley, CA 94720, USA

fYear

1986

fDate

28-30 May 1986

Firstpage

Lastpage

Keywords

Computational modeling; Equations; Geometry; Glass; Laboratories; Oxidation; Silicon; Stress; Surface tension; Viscosity;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1986. Digest of Technical Papers. Symposium on

Conference_Location

San Diego, CA, USA

Type

Filename

4480359

Link To Document