DocumentCode
472813
Title
A Versatile Multilevel Metallisation Technology for VLSI Applications
Author
Perkins, K.D. ; Maleham, J. ; Rhodes, S.J. ; Boys, D.R.
Author_Institution
Plessey Research (Caswell) Ltd. Allen Clark Research Centre, Caswell, Towcester, Northants, England
fYear
1981
fDate
9-11 Sept. 1981
Firstpage
80
Lastpage
81
Keywords
Coatings; Electromigration; Etching; Insulation testing; Integrated circuit interconnections; Metallization; Polyimides; Production; Resists; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1981. Digest of Technical Papers. Symposium on
Conference_Location
Maui, HI, USA
Type
conf
Filename
4480536
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