DocumentCode

472834

Title

"Submicron Devices for VLSI"

fYear

1982

fDate

1-3 Sept. 1982

Firstpage

32

Lastpage

32

Keywords

Very large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1982. Digest of Technical Papers. Symposium on

Conference_Location

Oiso, Japan

Type

conf

Filename

4480565